Business introduce

Quartz

We provide high quality quartz parts for Wet Station and Dry Machine.
Such like:

  • Wafer guide
  • Wafer Chuck
  • Quartz Disk
  • Quartz Tank
  • Quartz Plate

Used parts/obsolete parts

We provide OEM, ODM 2nd Source parts for Quartz or Electric controller, motors and some un- continued parts solution.

Ultrasonic

DNS, KAIJO Wet Station use or CMP Ebara SPOT Shower,

Trouble shooting and Pre maintain Service.

Tool maintain service

  • Robot possion adjustment
  • Robot movement confirmation
  • Quartz assembling
  • FA possion check
  • Parts repair
  • Troubleshooting

Tool retrofit

  • Software modification and install
  • Hardware modification

WET BENCH

  • New and used tool